Decomposing multi-patterned design layers into colors has traditionally been an exercise in finding at least one DRC legal coloring solution. In this white paper we discuss how manufacturers at more advanced nodes are now finding significant yield and performance differences among DRC legal coloring solutions. It is important to recognize that not all DRC legal multi-patterning decomposition choices are created equal and attention must be paid to the following: Effects of density variation in color assignments on process robustness; Benefits of keeping color regularity within design circuits with repetitive structures like memories; Improvements in hotspot issues by using DFM-aware coloring.
Download this white paper from Mentor Graphics to learn more…