System-level verification of the MEMS devices and associated electronic circuitry is becoming a requirement for advanced IoT designs. This is driving the demand for better modeling and simulation methodologies. The optimal system-level design methodology facilitates MEMS device models and structure representations that are compatible with the IC design flow and provide simulation accuracy and speed comparable to typical analysis tools. This methodology should provide broad coverage of physical effects, as well as the capability to support large system complexity and quick design iteration. This paper presents the current approaches to system-level MEMS modeling and simulation.
